Data format transferring for FIB microfabrication

被引：10

作者：

Fu, YQ ^{[1
]}

Bryan, NKA ^{[1
]}

San, OA ^{[1
]}

Hong, LB ^{[1
]}

机构：

[1] Nanyang Technol Univ, Sch Mech & Prod Engn, Precis Engn Lab, Singapore 639798, Singapore

来源：

INTERNATIONAL JOURNAL OF ADVANCED MANUFACTURING TECHNOLOGY | 2000年 / 16卷 / 08期

关键词：

data format; FIB; microfabrication; transformation;

D O I：

10.1007/s001700070050

中图分类号：

TP [自动化技术、计算机技术];

学科分类号：

0812 ;

摘要：

Data format transformation is very important for 2D mid 3D nanofabrication of FIB technology because only one map file format with the extension name XBM is available in FIB workstation software. This XBM format has only a few drawing functions which limits the bitmap editor when creating a complicated map file such as a spiral or a gear. Therefore, it is necessary to make use of specialised software which? can transfer map files created by other during software such as AutoCAD and CorelDRAW into the FIB machine in the required XBM map file format. The method of transferring a map file created by AutoCADR14 into the XBM format file is discussed in detail in this paper. It is available for practical FIB micromanufacturing.

引用

页码：600 / 602

页数：3