Instantaneous phase-shift, point-diffraction interferometer.

被引:12
作者
Millerd, JE [1 ]
Martinek, SJ [1 ]
Brock, NJ [1 ]
Hayes, JB [1 ]
Wyant, JC [1 ]
机构
[1] 4D Technol Corp, Tucson, AZ 85706 USA
来源
OPTICAL DATA STORAGE 2004 | 2004年 / 5380卷
关键词
D O I
10.1117/12.557126
中图分类号
TP3 [计算技术、计算机技术];
学科分类号
0812 ;
摘要
We demonstrate an instantaneous phase-shift, point diffraction interferometer that achieves high accuracy and is capable of measuring a single pulse of light at NA greater than 0.8.
引用
收藏
页码:422 / 429
页数:8
相关论文
共 11 条
[1]   Optimal phase contrast in common-path interferometry [J].
Glückstad, J ;
Mogensen, PC .
APPLIED OPTICS, 2001, 40 (02) :268-282
[2]  
GONG Q, 1995, SPIE, V2544, P358
[3]   Three channel phase-shifting interferometer using polarization-optics and a diffraction grating [J].
Hettwer, A ;
Kranz, J ;
Schwider, J .
OPTICAL ENGINEERING, 2000, 39 (04) :960-966
[4]  
JENSEN MA, 2000, J OPT SOC AM A, V17
[5]  
MEDECKI H, 1996, OPTICS LETT, V21
[6]   Liquid-crystal point-diffraction interferometer for wave-front measurements [J].
Mercer, CR ;
Creath, K .
APPLIED OPTICS, 1996, 35 (10) :1633-1642
[7]  
MILLERD JE, 2001, Patent No. 6304330
[8]  
NEAL MJ, 2003, THESIS U ARIZONA
[9]   THEORY AND APPLICATION OF POINT-DIFFRACTION INTERFEROMETERS [J].
SMARTT, RN ;
STEEL, WH .
JAPANESE JOURNAL OF APPLIED PHYSICS, 1975, 14 :351-356
[10]  
6108131