Silicon microphone development and application

被引：39

作者：

Dehe, Alfons ^{[1
]}

机构：

[1] Infineon Technol AG, Automot Ind & Multimarket, Munich, Germany

来源：

SENSORS AND ACTUATORS A-PHYSICAL | 2007年 / 133卷 / 02期

关键词：

microphone; silicon micromachining; packaging; directional microphone;

D O I：

10.1016/j.sna.2006.06.035

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

This paper gives an overview of the development of Silicon microphones fabricated in a standard BiCMOS process line of Infineon. MEMS development results in reliable processes for high sensitivity poly-silicon membranes. Microphones with sensitivity up to -39 dB V/Pa at 2 V bias and a signal to noise ratio of up to 65 dB(A) are presented. The impact of packaging on the product design is described. As an example a directional microphone with cardioid response and backward noise suppression of 19 dB is described. (c) 2006 Elsevier B.V. All rights reserved.

引用

页码：283 / 287

页数：5