High power-durable RF-band SAW filters using single-crystal Al/Ti electrodes grown on 64° Y-X LiNbO3 substrates

被引：10

作者：

Kimura, N ^{[1
]}

Nakano, M ^{[1
]}

Sato, K ^{[1
]}

机构：

[1] TDK Corp, Adv Prod Dev Ctr, Chiba 272, Japan

来源：

ELECTRONICS LETTERS | 1998年 / 34卷 / 01期

关键词：

D O I：

10.1049/el:19980105

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

To improve the power-durability of RF-band SAW faters, single crystal Al/Ti electrode films were successfully grown on 64 degrees Y-X LiNbO3, substrates by the electron-beam vapour deposition technique. The time to failure of the single-crystal Al/Ti electrodes became approximately 680 times longer than that of Al-Cu alloy electrodes.

引用

页码：131 / 132

页数：2

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