A suspended microchannel with integrated temperature sensors for high-pressure flow studies

被引：40

作者：

Wu, S ^{[1
]}

Mai, J ^{[1
]}

Zohar, Y ^{[1
]}

Tai, YC ^{[1
]}

Ho, CM ^{[1
]}

机构：

[1] CALTECH, Dept Elect Engn, Pasadena, CA 91125 USA

来源：

MICRO ELECTRO MECHANICAL SYSTEMS - IEEE ELEVENTH ANNUAL INTERNATIONAL WORKSHOP PROCEEDINGS | 1998年

关键词：

D O I：

10.1109/MEMSYS.1998.659734

中图分类号：

TP [自动化技术、计算机技术];

学科分类号：

0812 ;

摘要：

A freestanding microchannel, with integrated temperature sensors, has been developed for high-pressure flow studies. These microchannels are approximately 20 mu m x 2 mu m x 4400 mu m, and are suspended above 80 mu m deep cavities, bulk micromachined using BrF3 dry etch. The calibration of the lightly boron-doped thermistor-type sensors shows that the resistance sensitivity of these integrated sensors is parabolic with respect to temperature and linear with respect to pressure. Volumetric flow rates of Nz in the microchannel were measured at inlet pressures up to 578psig. The discrepancy between the data and theory results from the flow acceleration in a channel, the nonparabolic velocity profile, and the bulging of the channel. Bulging effects were evaluated by using incompressible water flow measurements, which also measures 1.045x10(-3)N-s/m(2) for the viscosity of DI water. The temperature data from sensors on the channel shows the heating of the channel due to the friction generated by the high-pressure flow inside.

引用

页码：87 / 92

页数：4