Strain gauge pressure and volume-flow transducers made by thermoplastic molding and membrane transfer

被引：15

作者：

Martin, J ^{[1
]}

Bacher, W ^{[1
]}

Hagena, OF ^{[1
]}

Schomburg, WK ^{[1
]}

机构：

[1] Forschungszentrum Karlsruhe, IMT, D-76021 Karlsruhe, Germany

来源：

MICRO ELECTRO MECHANICAL SYSTEMS - IEEE ELEVENTH ANNUAL INTERNATIONAL WORKSHOP PROCEEDINGS | 1998年

关键词：

D O I：

10.1109/MEMSYS.1998.659783

中图分类号：

TP [自动化技术、计算机技术];

学科分类号：

0812 ;

摘要：

Strain gauge pressure and volume-flow transducers have been developed using the techniques of the so-called AMANDA process. It combines injection molding, surface micromachining, and membrane transfer and allows low-cost batch production of microfluidic devices. The strain gauges of the pressure transducer measure the deformation of a thin plate which is a linear function of the differential pressure. For temperature compensation, four strain gauges are arranged to a Wheatstone bridge, operated at constant supply voltage. Different designs cover the pressure range of up to 1 bar, the outer dimensions being 5.5 x 4.3 x 1.2 mm(3). A special design with an integrated capillary is used to measure volume flows.

引用

页码：361 / 366

页数：4