Effect of the substrate temperature on the properties of RE-Fe-B thin film magnets

被引：12

作者：

Castaldi, L

Gibbs, MRJ

Davies, HA

机构：

[1] Univ Sheffield, Sheffield Ctr Adv Magnet Mat & Devices, Dept Mat Engn, Sheffield S1 3JD, S Yorkshire, England

[2] Univ Sheffield, Sheffield Ctr Adv Magnet Mat & Devices, Dept Phys & Astron, Sheffield S1 7RH, S Yorkshire, England

来源：

JOURNAL OF APPLIED PHYSICS | 2004年 / 96卷 / 09期

基金：

英国工程与自然科学研究理事会;

关键词：

D O I：

10.1063/1.1775044

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

We report a systematic study of the structural, morphological, and magnetic properties of RE-Fe-B films prepared by magnetron sputtering on thermally oxidized Si substrates heated to temperatures T-s in the range between T(s)similar to470 and similar to800 degreesC during the deposition. The combination of crystallographic texture and mechanical and hard magnetic properties was observed for T(s)similar to470 degreesC, which results in better mechanical, textural, and hard magnetic properties in terms of perpendicular remanence (0.97 T), coercivity (420 kA/m), and maximum energy product (136 kJ/m(3)). (C) 2004 American Institute of Physics.

引用

页码：5063 / 5068

页数：6

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