Comparisons between PZT and PVDF thick films technologies in the design of low-cost pyroelectric sensors

被引:20
作者
Capineri, L
Masotti, L
Ferrari, V
Marioli, D
Taroni, A
Mazzoni, M
机构
[1] Univ Florence, Dept Elect & Telecommun, Ultrasound Lab, I-50139 Florence, Italy
[2] Univ Brescia, Dept Elect & Automat, I-25123 Brescia, Italy
[3] Univ Brescia, INFM, I-25123 Brescia, Italy
[4] CNR Elettron Quantist, Ist Fis Applicata Nello Carrara, I-50019 Florence, Italy
关键词
D O I
10.1063/1.1807002
中图分类号
TH7 [仪器、仪表];
学科分类号
0804 ; 080401 ; 081102 ;
摘要
This paper compares the characteristics of two types of four quadrant pyroelectric sensors, made with screen-printed PZT and PVDF thick films, respectively, which we used for low-cost contactless position determination and laser beam positioning. For the comparison we used their responsivities, measured with a CO2 laser, and their respective noise figures. For sensors designing we simulated the PZT sensor responsivity using an equivalent thermo-electric model already demonstrated for multilayer PVDF sensors. The barely known model parameters of the PZT and electrodes layers were deduced from the best fit of the temporal voltage response to two square wave periodic signals. The peak current responsivity, the bandwidth and the NEP of the various samples indicate PZT most suited for low-noise and PVDF for high frequency and large bandwidth IR laser beam applications, respectively. (C) 2004 American Institute of Physics.
引用
收藏
页码:4906 / 4910
页数:5
相关论文
共 13 条
[1]   Pyroelectric PVDF sensor modeling of the temporal voltage response to arbitrarily modulated radiation [J].
Capineri, L ;
Masotti, L ;
Mazzoni, M .
IEEE TRANSACTIONS ON ULTRASONICS FERROELECTRICS AND FREQUENCY CONTROL, 2000, 47 (06) :1406-1412
[2]   A beam position sensor for low power infrared laser diodes [J].
Capineri, L ;
Masotti, L ;
Mazzoni, M ;
Toci, G ;
Mazzinghi, P .
REVIEW OF SCIENTIFIC INSTRUMENTS, 1999, 70 (02) :1341-1348
[3]  
CAPINERI L, IN PRESS IEEE SENS J
[4]   Pyroelectricity of PZT-based thick-films [J].
De Cicco, G ;
Morten, B ;
Dalmonego, D ;
Prudenziati, M .
SENSORS AND ACTUATORS A-PHYSICAL, 1999, 76 (1-3) :409-415
[5]   Array of PZT pyroelectric thick-film sensors for contactless measurement of XY position [J].
Ferrari, V ;
Ghisla, A ;
Marioli, D ;
Taroni, A .
IEEE SENSORS JOURNAL, 2003, 3 (02) :212-217
[6]   Displacement sensor based on pyroelectric thick films and contactless light-spot cursor [J].
Ferrari, V ;
Marioli, D ;
Taroni, A .
IEEE TRANSACTIONS ON INSTRUMENTATION AND MEASUREMENT, 2002, 51 (04) :819-823
[7]   AN INTEGRATED INFRARED-SENSOR USING THE PYROELECTRIC POLYMER PVDF [J].
HAMMES, PCA ;
REGTIEN, PPL .
SENSORS AND ACTUATORS A-PHYSICAL, 1992, 32 (1-3) :396-402
[8]  
Kang SJ, 1998, IEEE T ULTRASON FERR, V45, P1255, DOI 10.1109/58.726451
[9]  
MUNCH WV, 1994, SENSOR ACTUAT A-PHYS, V41, P156
[10]  
Naldoni F., 1997, Proceedings of the 2nd Italian Conference on Sensors and Microsystems. Artificial and Natural Perception, P269