Method for aligned bamboolike carbon nanotube growth using RF magnetron sputtering

被引：7

作者：

Lee, KY ^{[1
]}

Honda, S ^{[1
]}

Ikuno, T ^{[1
]}

Fujimoto, K ^{[1
]}

Tsuji, K ^{[1
]}

Ohkura, S ^{[1
]}

Katayama, M ^{[1
]}

Hirao, T ^{[1
]}

Oura, K ^{[1
]}

机构：

[1] Osaka Univ, Grad Sch Engn, Dept Elect Engn, Suita, Osaka 5650871, Japan

来源：

JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS BRIEF COMMUNICATIONS & REVIEW PAPERS | 2003年 / 42卷 / 2A期

关键词：

aligned carbon nanotubes; RF magnetron sputtering; hot filament; bamboolike structure; large-area synthesis; plasma;

D O I：

10.1143/JJAP.42.713

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

We present a method for aligned bamboolike carbon nanotube (CNT) growth using RF magnetron sputtering. It has been revealed that aligned CNTs can be synthesized by adopting a hot filament in the sputtering system, as demonstrated for CNTs on an Ni/Si substrate. The resultant CNTs were found to be aligned vertically on the substrate with uniform height and have a bamboolike structure. Similar results were obtained for sputtering deposition under a negative sample bias, indicating that the effect of the hot filament can be attributed to the energy enhancement of the carbon particles impinging on the growth front, which plays an essential role in the growth of CNTs by sputtering.

引用

页码：713 / 715

页数：3

共 19 条

[1] MAGNETRON SPUTTERING WITH ADDITIONAL IONIZATION EFFECT BY ELECTRON-BEAM
ADACHI, R
TAKESHITA, K
[J]. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY, 1982, 20 (01): : 98 - 99
[2] Single-electron transport in ropes of carbon nanotubes
Bockrath, M
Cobden, DH
McEuen, PL
Chopra, NG
Zettl, A
Thess, A
Smalley, RE
[J]. SCIENCE, 1997, 275 (5308) : 1922 - 1925
[3] Plasma-induced alignment of carbon nanotubes
Bower, C
Zhu, W
Jin, SH
Zhou, O
[J]. APPLIED PHYSICS LETTERS, 2000, 77 (06) : 830 - 832
[4] Hydrogen storage of dense-aligned carbon nanotubes
Cao, AY
Zhu, HW
Zhang, XF
Li, XS
Ruan, DB
Xu, CL
Wei, BQ
Liang, J
Wu, DH
[J]. CHEMICAL PHYSICS LETTERS, 2001, 342 (5-6) : 510 - 514
[5] Field emission from aligned high-density graphitic nanofibers
Chen, Y
Patel, S
Ye, YG
Shaw, ST
Luo, LP
[J]. APPLIED PHYSICS LETTERS, 1998, 73 (15) : 2119 - 2121
[6] HELICAL MICROTUBULES OF GRAPHITIC CARBON
IIJIMA, S
[J]. NATURE, 1991, 354 (6348) : 56 - 58
[7] Large-scale production of single-walled carbon nanotubes by the electric-arc technique
Journet, C
Maser, WK
Bernier, P
Loiseau, A
delaChapelle, ML
Lefrant, S
Deniard, P
Lee, R
Fischer, JE
[J]. NATURE, 1997, 388 (6644) : 756 - 758
[8] Bucky shuttle memory device:: Synthetic approach and molecular dynamics simulations
Kwon, YK
Tománek, D
Iijima, S
[J]. PHYSICAL REVIEW LETTERS, 1999, 82 (07) : 1470 - 1473
[9] Growth model of bamboo-shaped carbon nanotubes by thermal chemical vapor deposition
Lee, CJ
Park, J
[J]. APPLIED PHYSICS LETTERS, 2000, 77 (21) : 3397 - 3399
[10] Low-temperature growth of carbon nanotubes by thermal chemical vapor deposition using Pd, Cr, and Pt as co-catalyst
Lee, CJ
Park, J
Kim, JM
Huh, Y
Lee, JY
No, KS
[J]. CHEMICAL PHYSICS LETTERS, 2000, 327 (5-6) : 277 - 283

← 1 2 →