Preparation and characterisation of titanium-tungsten sensors

被引：24

作者：

Guidi, V

Boscarino, D

Comini, E

Faglia, G

Ferroni, M

Malagù, C

Martinelli, G

Rigato, V

Sberveglieri, G

机构：

[1] Univ Ferrara, Dept Phys, I-44100 Ferrara, Italy

[2] INFM, I-44100 Ferrara, Italy

[3] INFN Ferrara, I-44100 Ferrara, Italy

[4] Ist Nazl Fis Nucl, Lab Nazl Legnaro, I-35100 Legnaro, PD, Italy

[5] Univ Brescia, INFM, Dept Chem & Phys Mat, I-25133 Brescia, Italy

来源：

SENSORS AND ACTUATORS B-CHEMICAL | 2000年 / 65卷 / 1-3期

关键词：

TiO; WO3; gas-sensor; sputtering;

D O I：

10.1016/S0925-4005(99)00295-6

中图分类号：

O65 [分析化学];

学科分类号：

070302 ; 081704 ;

摘要：

Thin films of W-Ti-O mixed oxides were prepared by reactive r.f sputtering of various Ti/W targets. Depending on the Ti/W content and annealing temperature, nanosized films with different polycrystalline structure were achieved. The layers exhibit good sensing capability to NO2 with scarce influence by CO. (C) 2000 Elsevier Science S.A. All rights reserved.

引用

页码：264 / 266

页数：3

共 4 条

[1] Microstructural characterization of a titanium-tungsten oxide gas sensor
Ferroni, M
Guidi, V
Martinelli, G
Sberveglieri, G
[J]. JOURNAL OF MATERIALS RESEARCH, 1997, 12 (03) : 793 - 798
[2] Characterization of a nanosized TiO2 gas sensor
Ferroni, M
Guidi, V
Martinelli, G
Faglia, G
Nelli, P
Sberveglieri, G
[J]. NANOSTRUCTURED MATERIALS, 1996, 7 (07): : 709 - 718
[3] A novel method for the preparation of nanosized TiO2 thin films
Sberveglieri, G
Depero, LE
Ferroni, M
Guidi, V
Martinelli, G
Nelli, P
Perego, C
Sangaletti, L
[J]. ADVANCED MATERIALS, 1996, 8 (04) : 334 - 337
[4] WO3 SPUTTERED THIN-FILMS FOR NOX MONITORING
SBERVEGLIERI, G
DEPERO, L
GROPPELLI, S
NELLI, P
[J]. SENSORS AND ACTUATORS B-CHEMICAL, 1995, 26 (1-3) : 89 - 92

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