共 34 条
[1]
Optimized oxygen plasma etching of polyimide films for low loss optical waveguides
[J].
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS,
2002, 20 (05)
:1587-1591
[2]
[Anonymous], 1982, PLASMA SCI TECHNOLOG
[5]
CVELBAR U, 2003, APPL SURF SCI
[9]
Long Ni cantilever fabrication with new sacrificial process
[J].
JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS,
2002, 41 (6B)
:4327-4331
[10]
Kotulanová A, 2002, ACTA CHIM SLOV, V49, P437