Heterogeneous recombination of neutral oxygen atoms on niobium surface

被引:13
作者
Mozetic, M
Zalar, A
Cvelbar, U
Poberaj, I
机构
[1] Inst Surface Eng & Optoelect, SI-1000 Ljubljana, Slovenia
[2] Univ Ljubljana, Fac Math & Phys, SI-1000 Ljubljana, Slovenia
关键词
plasma processing; oxygen; niobium; adatoms;
D O I
10.1016/S0169-4332(03)00202-2
中图分类号
O64 [物理化学(理论化学)、化学物理学];
学科分类号
070304 ; 081704 ;
摘要
The recombination coefficient for the reaction O + O --> O-2 on a polycrystalline niobium surface was measured at various experimental conditions. The source of O atoms was a low pressure weakly ionized highly dissociated oxygen plasma created in a RF discharge. The electron temperature in plasma was about 5 eV and the density of positive ions between 5 and 10 x 10(15) m(-3). The density of neutral oxygen atoms was measured in the afterglow with a nickel catalytic probe and was between 2.5 and 7 x 10(21) m(-3). The recombination coefficient was measured at different temperature between 420 and 620 K, and was found to be a constant within the limits of the experimental error at the value of 0.09 +/- 0.018. (C) 2003 Elsevier Science B.V. All rights reserved.
引用
收藏
页码:96 / 101
页数:6
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