Pulsed-laser deposition of barium titanate films and plume dynamics

被引：27

作者：

Nakata, Y ^{[1
]}

Soumagne, G ^{[1
]}

Okada, T ^{[1
]}

Maeda, M ^{[1
]}

机构：

[1] Kyushu Univ, Grad Sch Informat Sci & Elect Engn, Fukuoka 81281, Japan

来源：

APPLIED SURFACE SCIENCE | 1998年 / 127卷

关键词：

barium titanate thin film; pulsed-laser deposition; imaging laser-induced fluorescence; plume dynamics; second harmonic generation;

D O I：

10.1016/S0169-4332(97)00720-4

中图分类号：

O64 [物理化学（理论化学）、化学物理学];

学科分类号：

070304 ; 081704 ;

摘要：

Barium titanate (BaTiO(3)) thin films were fabricated by the pulsed-laser deposition (PLD) technique. The temporal changes of ablated barium (Ba) and titanium (Ti) atoms in the gas phase during PLD process were monitored by imaging laser-induced fluorescence (LIF) technique. The expansion of the plume was influenced by the presence of a hot substrate as well as the pressure of an ambient oxygen gas. The quality of deposited films were characterized by X-ray diffraction (XRD) method, scanning electron microscope (SEM) and in-situ optical second harmonic generation (SHG). A smooth surface was obtained when die film was deposited at 10 mTorr. The lattice parameter was shortened, as the ambient oxygen gas pressure was increased. (C) 1998 Elsevier Science B.V.

引用

页码：650 / 654

页数：5