Rotating dust ring in an RF discharge coupled with a dc-magnetron sputter source.: Experiment and simulation

被引:33
作者
Matyash, K
Fröhlich, M
Kersten, H
Thieme, G
Schneider, R
Hannemann, M
Hippler, R
机构
[1] Inst Niedertemp Plasma Phys Greifswald, D-17489 Greifswald, Germany
[2] Ernst Moritz Arndt Univ Greifswald, Inst Phys, Greifswald, Germany
[3] Teilinst Greifwald, Max Planck Inst Plasmaphys, D-17489 Greifswald, Germany
关键词
D O I
10.1088/0022-3727/37/19/013
中图分类号
O59 [应用物理学];
学科分类号
摘要
During an experiment involving coating of dust grains trapped in an RF discharge using a sputtering dc-magnetron source, a rotating dust ring was observed and investigated. After the magnetron was switched on, the dust cloud levitating above the RF electrode formed a ring rotating as a rigid body. Langmuir probe diagnostics were used for the measurement of plasma density and potential. It was discovered that the coupling of the dc-magnetron source to the RF discharge causes steep radial gradients in electron density and plasma potential. The rotation of the dust ring is attributed to the azimuthal component of the ion drag force, which appears due to the azimuthal drift of the ions caused by crossed radial electric and axial magnetic fields. In order to get more insight into the mechanism of dust ring rotation, a Particle-in-Cell simulation of a rotating dust cloud was performed. The results of the experiment and simulation are presented and discussed.
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收藏
页码:2703 / 2708
页数:6
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