Development of a transfer standard with sonic Venturi nozzles for small mass flow rates of gases

被引：17

作者：

Hayakawa, M ^{[1
]}

Ina, Y ^{[1
]}

Yokoi, Y ^{[1
]}

Takamoto, M ^{[1
]}

Nakao, S ^{[1
]}

机构：

[1] Hirai Co Ltd, Syst Div, Lab 2 80 1, Tokyo 2080023, Japan

来源：

FLOW MEASUREMENT AND INSTRUMENTATION | 2000年 / 11卷 / 04期

关键词：

transfer standard; sonic Venturi nozzle; mass flow controller;

D O I：

10.1016/S0955-5986(00)00032-7

中图分类号：

TH [机械、仪表工业];

学科分类号：

0802 ;

摘要：

We have developed a transfer standard system with sonic Venturi nozzles for small mass flow rates of gases. The system is composed of a newly developed automatic pressure controller, two pressure sensors and one temperature sensor to measure the flow conditions in the upstream and downstream sides of a nozzle. The whole system is packed in a portable aluminum trunk. The data are sent to a laptop computer, and the results are displayed on the screen and are written to files. The system can calibrate a flow meter in the flow rate range from 10 mg/min to 100 g/min using ten different sonic Venturi nozzles with the expanded standard uncertainty (k=2) being less than 0.2% for nitrogen. Examples of mass flow controller calibrations are given. (C) 2000 Elsevier Science Ltd. All rights reserved.

引用

页码：279 / 283

页数：5