Stoichiometry and adhesion of Nb/Al2O3

被引:157
作者
Zhang, W [1 ]
Smith, JR
机构
[1] Princeton Univ, Princeton Mat Inst, Princeton, NJ 08540 USA
[2] Delphi Res Labs, Warren, MI 48090 USA
关键词
D O I
10.1103/PhysRevB.61.16883
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
We examine the relative stability of both stoichiometric and nonstoichiometric Nb/Al2O3 interfaces and Al2O3 surfaces. Results of first-principles computations of surface and interfacial atomic relaxations, electron-density distributions, and total energies are presented. We found that while the Al-terminated Al2O3(0001) surface is stable relative to the O-terminated surface, interface formation with Nb can reverse the stability, depending on the oxygen partial pressure. This interfacial structure is consistent with recent experimental results. Finally, we computed some of the energetics associated with the diffusion of Al into Nb across the Nb/Al2O3 interface. Our results an consistent with Al migration into the Nb at temperatures of the order of 10(3) K, as reported experimentally.
引用
收藏
页码:16883 / 16889
页数:7
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