Microstructure and morphology of tin dioxide multilayer thin film gas sensors

被引：50

作者：

Sangaletti, L

Depero, LE

Dieguez, A

Marca, G

Morante, JR

Romano-Rodriguez, A

Sberveglieri, G

机构：

[1] Univ Brescia, Ist Nazl Fis Mat, I-25123 Brescia, Italy

[2] Univ Brescia, Dipatimento Chim & Fis Ingn & Mat, I-25123 Brescia, Italy

[3] Univ Barcelona, EME, E-08028 Barcelona, Spain

来源：

SENSORS AND ACTUATORS B-CHEMICAL | 1997年 / 44卷 / 1-3期

关键词：

microstructure; morphology; tin dioxide; multilayer; thin film; gas sensors;

D O I：

10.1016/S0925-4005(97)00218-9

中图分类号：

O65 [分析化学];

学科分类号：

070302 ; 081704 ;

摘要：

Structural, morphological, and electrical measurements have been carried out on SnO(2) multilayer thin film grown by the rheotaxial growth and thermal oxidation method on Al(2)O(3) substrates. The analysis of X-ray and electron diffraction patterns shows that, in addition to the SnO(2) cassiterite phase, a contribution from another SnO(2) phase is present, which can be related to cassiterite by introducing microtwinning effects. The electrical measurements show that these thin films have a higher sensitivity towards CO with respect to the conventional single layer SnO(2) sensors. (C) 1997 Elsevier Science S.A.

引用

页码：268 / 274

页数：7

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