Replication of 3D-micro- and nanostructures using different UV-curable polymers

被引：13

作者：

Rudschuck, S ^{[1
]}

Hirsch, D ^{[1
]}

Zimmer, K ^{[1
]}

Otte, K ^{[1
]}

Braun, A ^{[1
]}

Mehnert, R ^{[1
]}

Bigl, F ^{[1
]}

机构：

[1] Inst Surface Modificat, D-04318 Leipzig, Germany

来源：

MICROELECTRONIC ENGINEERING | 2000年 / 53卷 / 1-4期

关键词：

Atomic force microscopy - Curing - Electron beam lithography - Interferometry - Microelectromechanical devices - Molding - Nanostructured materials - Polymethyl methacrylates - Reactive ion etching - Scanning electron microscopy - Silicon wafers - Ultraviolet radiation;

D O I：

10.1016/S0167-9317(00)00377-4

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

Replica moulding with a curing technique offers the possibility to fabricate 3D-micro- and nano-structures at low cost and high throughput. We studied the influence of various polymer formulations on the replication of different 3D-structures over a wide range of pattern sizes. The pattern fidelity, the tips and edges as well as the roughness were characterized with regard to the polymer formulations by optical interferometry, atomic force microscopy and scanning electron microscopy.

引用

页码：557 / 560

页数：4

共 6 条

[1] Excimer laser micromachining and replication of 3D optical surfaces [J].