共 28 条
[1]
Transient measurement of resist charging during electron beam exposure
[J].
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B,
2003, 21 (01)
:106-111
[3]
Burmeister F, 1998, ADV MATER, V10, P495, DOI 10.1002/(SICI)1521-4095(199804)10:6<495::AID-ADMA495>3.0.CO
[4]
2-A