Silicon mirrors and micromirror arrays for spatial laser beam modulation

被引：34

作者：

Kurth, S ^{[1
]}

Hahn, R ^{[1
]}

Kaufmann, C ^{[1
]}

Kehr, K ^{[1
]}

Mehner, J ^{[1
]}

Wollmann, U ^{[1
]}

Dotzel, W ^{[1
]}

Gessner, T ^{[1
]}

机构：

[1] Tech Univ Chemnitz Zwickau, Dept Elect Engn & Informat Technol, D-09107 Chemnitz, Germany

来源：

SENSORS AND ACTUATORS A-PHYSICAL | 1998年 / 66卷 / 1-3期

关键词：

micromirror arrays; two-directional deflection; modified BESOI technology;

D O I：

10.1016/S0924-4247(97)01731-7

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

This contribution deals with the design, technology and experimental investigations of mirrors and micromirror arrays made of monocrystalline silicon. Electrostatically operated two-directionally defecting mirrors and mirror arrays for continuous scanning with working frequencies between several 100 Hz and 200 kHz are presented. The modified BESOI technology used and the experimental-data-based method to improve the accuracy of model parameters for simulations and to determine the cross-coupling between array cells are new in the held of micromechanics. Furthermore, results of application-related experiments of laser projection are given. (C) 1998 Elsevier Science S.A. All rights reserved.

引用

页码：76 / 82

页数：7

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