Diagnostics of the early phase of an ultraviolet laser induced plasma by spectral line analysis considering self-absorption

被引:148
作者
Hermann, J [1 ]
Boulmer-Leborgne, C [1 ]
Hong, D [1 ]
机构
[1] Univ Orleans, CNRS, GREMI, F-45067 Orleans 2, France
关键词
D O I
10.1063/1.366639
中图分类号
O59 [应用物理学];
学科分类号
摘要
We have performed time-and space-resolved plasma diagnostics during ultraviolet excimer laser ablation of a Ti target in a low pressure N-2 atmosphere. Spectral lines emitted from metal vapor ions in the early plasma phase (t less than or equal to 200 ns) have been analyzed and compared to Line profiles computed for a plasma in a local thermodynamic equilibrium. (C) 1998 American Institute of Physics. [S0021-8979(98)05802-2].
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收藏
页码:691 / 696
页数:6
相关论文
共 11 条
  • [1] GROWTH OF THIN-FILMS BY LASER-INDUCED EVAPORATION
    CHEUNG, JT
    SANKUR, H
    [J]. CRC CRITICAL REVIEWS IN SOLID STATE AND MATERIALS SCIENCES, 1988, 15 (01): : 63 - 109
  • [2] CIOBANU SS, 1997, 23 ICPIG TOUL, V2, P102
  • [3] DRAWIN HW, 1970, PROGR PLASMA GAS ELE, V1, P590
  • [4] Griem H. R., 1974, Spectral Line Broadening by Plasmas
  • [5] Griem HR, 1964, Plasma Spectroscopy
  • [6] PLASMA DIAGNOSTICS IN PULSED-LASER TIN LAYER DEPOSITION
    HERMANN, J
    THOMANN, AL
    BOULMERLEBORGNE, C
    DUBREUIL, B
    DEGIORGI, ML
    PERRONE, A
    LUCHES, A
    MIHAILESCU, IN
    [J]. JOURNAL OF APPLIED PHYSICS, 1995, 77 (07) : 2928 - 2936
  • [7] MULTISTAGE PLASMA INITIATION PROCESS BY PULSED CO2-LASER IRRADIATION OF A TI SAMPLE IN AN AMBIENT GAS (HE, AR, OR N-2)
    HERMANN, J
    BOULMERLEBORGNE, C
    MIHAILESCU, IN
    DUBREUIL, B
    [J]. JOURNAL OF APPLIED PHYSICS, 1993, 73 (03) : 1091 - 1099
  • [8] GAS-FLOW DYNAMICS IN LASER ABLATION DEPOSITION
    KOOLS, JCS
    BALLER, TS
    DEZWART, ST
    DIELEMAN, J
    [J]. JOURNAL OF APPLIED PHYSICS, 1992, 71 (09) : 4547 - 4556
  • [9] Effect of Knudsen-layer formation on the initial expansion and angular distribution of a laser-produced copper plasma at reduced pressure of air
    Pietsch, W
    [J]. JOURNAL OF APPLIED PHYSICS, 1996, 79 (03) : 1250 - 1257
  • [10] SAENGER KL, 1993, P ADV MATER, V2, P1