Field emission from carbon nanosheets on pyramidal Si(100)

被引:21
作者
Chen, M. Y.
Yeh, C. M.
Syu, J. S.
Hwang, J. [1 ]
Kou, C. S.
机构
[1] Natl Tsing Hua Univ, Dept Mat Sci & Engn, Hsinchu, Taiwan
[2] Natl Tsing Hua Univ, Dept Phys, Hsinchu, Taiwan
关键词
Catalysts - Current density - Field emission - Microwaves - Plasma enhanced chemical vapor deposition - Silicon - Synthesis (chemical);
D O I
10.1088/0957-4484/18/18/185706
中图分类号
TB3 [工程材料学];
学科分类号
0805 ; 080502 ;
摘要
Carbon nanosheets were synthesized on pyramidal Si( 100) substrates without any catalyst in a microwave plasma-enhanced chemical vapour deposition process. The average length and the growth time of carbon nanosheets were measured to be similar to 300 nm and 10 min, equivalent to a growth rate of similar to 30 nm min(-1). By replacing flat Si( 100) with pyramidal Si( 100) as the substrate, the field emission performance of carbon nanosheets was greatly improved. A low turn-on field of 3.2 V mu m(-1) and a high current density of 2.5 mA cm(-2) at 7.0 V mu m(-1), close to those of carbon nanotube emitters, were achieved. The improvement in field emission was attributed primarily to the pyramidal shape.
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页数:4
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