Absolute sphericity measurement: a comparative study of the use of interferometry and a Shack-Hartmann sensor

被引：58

作者：

Pfund, J ^{[1
]}

Lindlein, N

Schwider, J

Burow, R

Blumel, T

Elssner, KE

机构：

[1] Univ Erlangen Nurnberg, Inst Phys, D-91058 Erlangen, Germany

[2] Berliner Inst Opt GmbH, D-12484 Berlin, Germany

来源：

OPTICS LETTERS | 1998年 / 23卷 / 10期

关键词：

D O I：

10.1364/OL.23.000742

中图分类号：

O43 [光学];

学科分类号：

070207 ; 0803 ;

摘要：

A comparison of absolute sphericity measurements with a Shack-Hartmann sensor and a Twyman-Green interferometer is presented. The absolute deviations of a test sphere from its ideal shape were calculated in both cases from the measured wave aberrations of three different positions. Very good qualitative and quantitative agreement of the results was achieved. The difference of the root-mean-square values of the two methods was 1/1000 of a wavelength. (C) 1998 Optical Society of America.

引用

页码：742 / 744

页数：3