Experimental comparison of a Shack-Hartmann sensor and a phase-shifting interferometer for large-optics metrology applications

被引：49

作者：

Koch, JA ^{[1
]}

Presta, RW ^{[1
]}

Sacks, RA ^{[1
]}

Zacharias, RA ^{[1
]}

Bliss, ES ^{[1
]}

Dailey, MJ ^{[1
]}

Feldman, M ^{[1
]}

Grey, AA ^{[1
]}

Holdener, FR ^{[1
]}

Salmon, JT ^{[1
]}

Seppala, LG ^{[1
]}

Toeppen, JS ^{[1
]}

Van Atta, L ^{[1
]}

Van Wonterghem, BM ^{[1
]}

Whistler, WT ^{[1
]}

Winters, SE ^{[1
]}

Woods, BW ^{[1
]}

机构：

[1] Lawrence Livermore Natl Lab, Livermore, CA 94551 USA

来源：

APPLIED OPTICS | 2000年 / 39卷 / 25期

关键词：

D O I：

10.1364/AO.39.004540

中图分类号：

O43 [光学];

学科分类号：

070207 ; 0803 ;

摘要：

We performed a direct side-by-side comparison of a Shack-Hartmann wave-front sensor and a phase-shifting interferometer for the purpose of characterizing large optics. An expansion telescope of our own design allowed us to measure the surface figure of a 400-mm-square mirror with both instruments simultaneously. The Shack-Hartmann sensor produced data that closely matched the interferometer data over spatial scales appropriate for the lenslet spacing, and much of the <20-nm rms systematic difference between the two measurements was due to diffraction artifacts that were present in the interferometer data but not in the Shack-Hartmann sensor data. The results suggest that Shack-Hartmann sensors could replace phase-shifting interferometers for many applications, with particular advantages for large-optic metrology. (C) 2000 Optical Society of America OCIS codes: 120.3180, 120.3930, 010.7060.

引用

页码：4540 / 4546

页数：7

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