Growth and characterization of thick GaN by sublimation method and homoepitaxial growth by metalorganic chemical vapor deposition

被引:30
作者
Kurai, S
Abe, T
Naoi, Y
Sakai, S
机构
来源
JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS | 1996年 / 35卷 / 03期
关键词
GaN; bulk GaN; sublimation; homoepitaxy; MOCVD; photopumping; stimulated emission; laser;
D O I
10.1143/JJAP.35.1637
中图分类号
O59 [应用物理学];
学科分类号
摘要
Thick GaN, 10-30 mu m, was grown on sapphire substrate by a sublimation method for the first time. GaN was homoepitaxially grown on this thick layer by metalorganic chemical vapor deposition to obtain a high-quality layer. Stimulated emission from a photopumped homoepitaxial GaN grown on thick GaN prepared by the sublimation method at room temperature was demonstrated. The threshold of the stimulated emission was estimated to be 1.04 MW/cm(2).
引用
收藏
页码:1637 / 1640
页数:4
相关论文
共 10 条
[1]   EFFECTS OF AIN BUFFER LAYER ON CRYSTALLOGRAPHIC STRUCTURE AND ON ELECTRICAL AND OPTICAL-PROPERTIES OF GAN AND GA1-XALXN(0-LESS-THAN-X-LESS-THAN-OR-EQUAL-TO-0.4) FILMS GROWN ON SAPPHIRE SUBSTRATE BY MOVPE [J].
AKASAKI, I ;
AMANO, H ;
KOIDE, Y ;
HIRAMATSU, K ;
SAWAKI, N .
JOURNAL OF CRYSTAL GROWTH, 1989, 98 (1-2) :209-219
[2]   STIMULATED-EMISSION NEAR ULTRAVIOLET AT ROOM-TEMPERATURE FROM A GAN FILM GROWN ON SAPPHIRE BY MOVPE USING AN AIN BUFFER LAYER [J].
AMANO, H ;
ASAHI, T ;
AKASAKI, I .
JAPANESE JOURNAL OF APPLIED PHYSICS PART 2-LETTERS, 1990, 29 (02) :L205-L206
[3]   THE HOMOEPITAXY OF GAN BY METALORGANIC VAPOR-PHASE EPITAXY USING GAN SUBSTRATES [J].
DETCHPROHM, T ;
HIRAMATSU, K ;
SAWAKI, N ;
AKASAKI, I .
JOURNAL OF CRYSTAL GROWTH, 1994, 137 (1-2) :170-174
[4]   GROWTH AND MORPHOLOGY OF GAN [J].
EJDER, E .
JOURNAL OF CRYSTAL GROWTH, 1974, 22 (01) :44-46
[5]  
KURAMATA A, 1995, TOP WORKSH 3 5 NITR
[6]  
NAOI Y, 1995, TOP WORKSH 3 5 NITR
[7]  
OKAZAKI H, 1995, TOP WORKSH 3 5 NITR
[8]   OBSERVATION AND INTERPRETATION OF ECCENTRIC GROWTH SPIRALS [J].
SUNAGAWA, I ;
NARITA, K ;
BENNEMA, P ;
VANDERHOEK, B .
JOURNAL OF CRYSTAL GROWTH, 1977, 42 (DEC) :121-126
[9]  
Zetterstrom R. B., 1970, Journal of Materials Science, V5, P1102, DOI 10.1007/BF02403284
[10]   SPONTANEOUS AND STIMULATED-EMISSION FROM PHOTOPUMPED GAN GROWN ON SIC [J].
ZUBRILOV, AS ;
NIKOLAEV, VI ;
TSVETKOV, DV ;
DMITRIEV, VA ;
IRVINE, KG ;
EDMOND, JA ;
CARTER, CH .
APPLIED PHYSICS LETTERS, 1995, 67 (04) :533-535