Gallium adsorption on (0001) GaN surfaces

被引:126
作者
Adelmann, C
Brault, J
Mula, G
Daudin, B
Lymperakis, L
Neugebauer, J
机构
[1] CEA Grenoble, SPMM, Dept Rech Fondamentale Mat Condensee, CEA CNRS Res Grp Nanophys & Semicond, F-38054 Grenoble 9, France
[2] Max Planck Gesell, Fritz Haber Inst, D-14195 Berlin, Germany
[3] Univ Cagliari, INFM, I-09042 Monserrato, CA, Italy
[4] Univ Cagliari, Dipartimento Fis, I-09042 Monserrato, CA, Italy
关键词
D O I
10.1103/PhysRevB.67.165419
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
We study the adsorption behavior of Ga on (0001) GaN surfaces combining experimental specular reflection high-energy electron diffraction with theoretical investigations in the framework of a kinetic model for adsorption and ab initio calculations of energy parameters. Based on the experimental results we find that for substrate temperatures and Ga fluxes typically used in molecular-beam epitaxy of GaN, finite equilibrium Ga surface coverages can be obtained. The measurement of a Ga/GaN adsorption isotherm allows the quantification of the equilibrium Ga surface coverage as a function of the impinging Ga flux. In particular, we show that a large range of Ga fluxes exists, where 2.5+/-0.2 monolayers (in terms of the GaN surface site density) of Ga are adsorbed on the GaN surface. We further demonstrate that the structure of this adsorbed Ga film is in good agreement with the laterally contracted Ga bilayer model predicted to be most stable for strongly Ga-rich surfaces [Northrup , Phys. Rev. B 61, 9932 (2000)]. For lower Ga fluxes, a discontinuous transition to Ga monolayer equilibrium coverage is found, followed by a continuous decrease towards zero coverage; for higher Ga fluxes, Ga droplet formation is found, similar to what has been observed during Ga-rich GaN growth. The boundary fluxes limiting the region of 2.5 monolayers equilibrium Ga adsorption have been measured as a function of the GaN substrate temperature giving rise to a Ga/GaN adsorption phase diagram. The temperature dependence is discussed within an ab initio based growth model for adsorption taking into account the nucleation of Ga clusters. This model consistently explains recent contradictory results of the activation energy describing the critical Ga flux for the onset of Ga droplet formation during Ga-rich GaN growth [Heying , J. Appl. Phys. 88, 1855 (2000); Adelmann , J. Appl. Phys. 91, 9638 (2002).].
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页数:9
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