Verify: Key to the stable single-electron-memory operation

被引:13
作者
Ishii, T [1 ]
Yano, K [1 ]
Sano, T [1 ]
Mine, T [1 ]
Murai, F [1 ]
Seki, K [1 ]
机构
[1] Hitachi Cent Res Lab, Tokyo 185, Japan
来源
INTERNATIONAL ELECTRON DEVICES MEETING - 1997, TECHNICAL DIGEST | 1997年
关键词
D O I
10.1109/IEDM.1997.650301
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
The impact of verify, which has been used in flash memory; however, has not been associated with single-electron memory, is analyzed and experimentally demonstrated. Using verify overcomes many obstacles to large-scale integration, including background charge variation, the inherent stochastic behavior of single-electron dynamics, and nanoscale structure variation, especially in naturally formed nanostructures, such as nano-silicon. A write/erase endurance of 10(7) cycles was demonstrated with nano-Si memory devices.
引用
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页码:171 / 174
页数:4
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