High resolution x-ray microscope

被引:10
作者
Gary, C. K.
Park, H.
Lombardo, L. W.
Piestrup, M. A.
Cremer, J. T.
Pantell, R. H.
Dudchik, Y. I.
机构
[1] Adelphi Technol Inc, San Carlos, CA 94070 USA
[2] Stanford Univ, Dept Elect Engn, Stanford, CA 94305 USA
[3] Inst Appl Phys Problems, Minsk 220064, BELARUS
基金
美国国家科学基金会;
关键词
D O I
10.1063/1.2734895
中图分类号
O59 [应用物理学];
学科分类号
摘要
The authors present x-ray images of grid meshes and biological material obtained using a microspot x-ray tube with a multilayer optic and a 92-element parabolic compound refractive lens (CRL) made of a plastic containing only hydrogen and carbon. Images obtained using this apparatus are compared with those using an area source with a spherical lens and a spherical lens with multilayer condenser. The authors found the best image quality using the multilayer condenser with a parabolic lens, compared to images with a spherical lens and without the multilayer optics. The resolution was measured using a 155-element parabolic CRL and a multilayer condenser with the microspot tube. The experiment demonstrates about 1.1 mu m resolution. (c) 2007 American Institute of Physics.
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页数:3
相关论文
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