Projection x-ray microscope powered by highly charged ions

被引:23
作者
Marrs, RE [1 ]
Schneider, DH [1 ]
McDonald, JW [1 ]
机构
[1] Univ Calif Lawrence Livermore Natl Lab, Livermore, CA 94551 USA
关键词
D O I
10.1063/1.1148496
中图分类号
TH7 [仪器、仪表];
学科分类号
0804 ; 080401 ; 081102 ;
摘要
Recombination of slow highly charged ions at the surface of a target foil can be used as a source of x rays for a projection x-ray microscope. In a first test of this concept, a low emittance beam of Ar18+ and Ar17+ ions from an electron beam ion trap was focused with einzel lenses to a 20 mu m full width at half maximum spot on a beryllium target foil. The 3 keV x rays from radiative deexcitation of the ions were used to obtain a magnified image of an electroformed nickel mesh with 20 mu m resolution by projection onto a CCD camera. Prospects for substantial improvements in resolution and intensity are discussed. (C) 1998 American Institute of Physics.
引用
收藏
页码:204 / 209
页数:6
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