Surface spinodal decomposition in low temperature Al0.48In0.52 grown on InP(001) by molecular beam epitaxy

被引:27
作者
Grenet, G [1 ]
Gendry, M
Oustric, M
Robach, Y
Porte, L
Hollinger, G
Marty, O
Pitaval, M
Priester, C
机构
[1] Ecole Cent Lyon, LEAME, Elect Lab, CNRS,UMR 5512, F-69131 Ecully, France
[2] Univ Lyon 1, Dept Phys Mat, F-69622 Villeurbanne, France
[3] IEMN, Dept ISEN, F-59652 Villeneuve Dascq, France
关键词
D O I
10.1016/S0169-4332(97)00522-9
中图分类号
O64 [物理化学(理论化学)、化学物理学];
学科分类号
070304 ; 081704 ;
摘要
The clustering development for lattice-matched Al0.48In0.52As grown on (001) oriented InP substrates by molecular beam epitaxy (MBE) has been investigated by ex-situ transmission electron microscopy (TEM) and in-situ scanning tunnelling microscopy (STM). For a growth temperature of 450 degrees C, a V/III beam equivalent pressure (BEP) ratio equal to 20 and a growth rate of 1 mu m h(-1), the clusters are strongly anisotropic: typically, 2 nm along the [110] direction, 30-50 nm along the [<1(1)over bar>0] direction and 20 nm along the [001] direction. We show theoretically that such a spinodal decomposition would be forbidden if the surface of the deposited film is perfectly flat. We also demonstrate that this decomposition appears to be possible if the surface roughness is sufficient to allow a partial elastic relaxation. (C) 1998 Elsevier Science B.V.
引用
收藏
页码:324 / 328
页数:5
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