Polymeric MST - high precision at low cost

被引：4

作者：

Elderstig, H

Larsson, O

机构：

[1] Industrial Microelectronics Centre, PO Box 1084

来源：

JOURNAL OF MICROMECHANICS AND MICROENGINEERING | 1997年 / 7卷 / 03期

关键词：

D O I：

10.1088/0960-1317/7/3/002

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

A low-cost production process for fabrication of polymeric microstructures from micromachined silicon is demonstrated in a splice for the splicing of optical fibers and an optical motherboard. Measurements on splices showed less than 0.5 dB insertion losses. The prototype polymeric motherboard concisted of an optical receiver module. The detector that was mounted on the polymeric optical motherboard detected about 70% of the transferred light. Measurements with modulated light indicates an optical bandwidth of 5 GHz at 2 V reverse current on the pin-diode.

引用

页码：89 / 92

页数：4