MEMS-based microgratings: preliminary results of novel configurations

The advent of micromachining has opened new doors for reducing the size and weight of conventional systems. A significant example is in the area of optics in which the size reduction can be exploited to prod;ce ultra-miniature systems using MEMS devices as the sensing or control elements. Using MEMS-based fabrication methods (the MUMPS runs), a series of optical diffraction gratings has been produced to examine limitations on the production methods and explore alternative applications. These devices consist of a variety of structures including single gratings, arrays of gratings and multi-periodic gratings. These devices are based on three dimensional architectures which can be adjusted in real time using electrostatic attraction from custom segmented electrode structures. The gratings were released and packaged for laboratory tests. Selected packaged devices were equipped with windows and integrated into a compact spectrograph to document spectral quality and performance. Preliminary results of mechanical, optical and electrical tests wilt be discussed.