Organic thermal and electrostatic ciliary microactuator array for object manipulation

被引：35

作者：

Suh, JW ^{[1
]}

Glander, SF ^{[1
]}

Darling, RB ^{[1
]}

Storment, CW ^{[1
]}

Kovacs, GTA ^{[1
]}

机构：

[1] UNIV WASHINGTON, DEPT ELECT ENGN, SEATTLE, WA 98185 USA

来源：

SENSORS AND ACTUATORS A-PHYSICAL | 1997年 / 58卷 / 01期

关键词：

ciliary microactuator arrays; electrostatic actuation; object manipulation; thermal actuation;

D O I：

10.1016/S0924-4247(97)80224-5

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

An organic thin-film ciliary microactuator array using independent thermal and electrostatic actuation is described. A polyimide thermal bimorph structure provides for large angle deflection with high load capacity. Electrostatic electrodes provide low-powerhold-down, capacitive sensing, and feedback control capabilities. Integrating four orthogonally oriented actuators into a unit cell and replicating this cell into an array allows for precise movement of small objects in arbitrary directions. The ciliary microactuator array has immediate applications for positioning, alignment, inspection, and assembly of small parts, such as IC dice, with micron-scale resolution.

引用

页码：51 / 60

页数：10

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