One-step multilevel microfabrication by reaction-diffusion

被引:40
作者
Campbell, CJ [1 ]
Klajn, R [1 ]
Fialkowski, M [1 ]
Grzybowski, BA [1 ]
机构
[1] Northwestern Univ, Dept Chem & Biol Engn, Evanston, IL 60208 USA
关键词
D O I
10.1021/la0487747
中图分类号
O6 [化学];
学科分类号
0703 ;
摘要
A new experimental technique is described that uses reaction-diffusion phenomena as a means of one-step microfabrication of complex, multilevel surface reliefs. Thin films of dry gelatin doped with potassium hexacyanoferrate are chemically micropatterned with a solution of silver nitrate delivered from an agarose stamp. Precipitation reaction between the two salts causes the surface to deform. The mechanism of surface deformation is shown to involve a sequence of reactions, diffusion, and gel swelling/contraction. This mechanism is established experimentally and provides a basis of a theoretical lattice-gas model that allows prediction surface topographies emerging from arbitrary geometries of the stamped features. The usefulness of the technique is demonstrated by using it to rapidly prepare two types of mold for passive microfluidic mixers.
引用
收藏
页码:418 / 423
页数:6
相关论文
共 34 条
  • [1] STIRRING BY CHAOTIC ADVECTION
    AREF, H
    [J]. JOURNAL OF FLUID MECHANICS, 1984, 143 (JUN) : 1 - 21
  • [2] A NOVEL TECHNIQUE FOR MULTIPLE-LEVEL DRY-ETCHING (MULDE) FEATURING SELF-ALIGNED ETCH MASKS
    BOCHE, B
    [J]. MICROELECTRONIC ENGINEERING, 1994, 26 (01) : 63 - 69
  • [3] Spontaneous formation of ordered structures in thin films of metals supported on an elastomeric polymer
    Bowden, N
    Brittain, S
    Evans, AG
    Hutchinson, JW
    Whitesides, GM
    [J]. NATURE, 1998, 393 (6681) : 146 - 149
  • [4] Microfluidic mixers: from microfabricated to self-assembling devices
    Campbell, CJ
    Grzybowski, BA
    [J]. PHILOSOPHICAL TRANSACTIONS OF THE ROYAL SOCIETY A-MATHEMATICAL PHYSICAL AND ENGINEERING SCIENCES, 2004, 362 (1818): : 1069 - 1086
  • [5] CAMPBELL CJ, 2004, IN PRESS ADV MAT
  • [6] Cost-effective mass fabrication of multilevel diffractive optical elements by use of a single optical exposure with a gray-scale mask on high-energy beam-sensitive glass
    Daschner, W
    Long, P
    Stein, R
    Wu, C
    Lee, SH
    [J]. APPLIED OPTICS, 1997, 36 (20): : 4675 - 4680
  • [7] Ehrfeld W, 2000, MESA MG, P33
  • [8] Ehrfeld W, 1998, TOP CURR CHEM, V194, P233
  • [9] Ehrfeld W., 2000, Microreactors: new technology for modern chemistry, DOI DOI 10.1002/3527601953
  • [10] Equilibrium swelling properties of polyampholytic hydrogels
    English, AE
    Mafe, S
    Manzanares, JA
    Yu, XH
    Grosberg, AY
    Tanaka, T
    [J]. JOURNAL OF CHEMICAL PHYSICS, 1996, 104 (21) : 8713 - 8720