The formation and characterization of palladium nanowires in growing carbon nanotubes using microwave plasma-enhanced chemical vapor deposition

被引:30
作者
Chan, LH [1 ]
Hong, KH [1 ]
Lai, SH [1 ]
Liu, XW [1 ]
Shih, HC [1 ]
机构
[1] Natl Tsing Hua Univ, Dept Mat Sci & Engn, Hsinchu 300, Taiwan
关键词
carbon; nanostructures; palladium; plasma processing and deposition;
D O I
10.1016/S0040-6090(02)00966-5
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
Multi-wall carbon nanotubes were synthesized on electroplated palladium nanoclusters using a microwave plasma-enhanced chemical vapor deposition system in a mixture of methane and hydrogen as precursors. During the synthesis, Pd was melted to fill up the growing multi-wall carbon nanotubes. A growth mechanism was proposed to describe the Pd filling phenomenon. The multi-wall carbon nanotubes could be burned in oxygen plasma and the filled Pd nanowires could thus be collected. The surface morphology of electroplated Pd clusters and the nanostructure of multi-wall carbon nanotubes with filled Pd nanowires were examined by scanning electron microscopy and transmission electron microscopy, respectively. Raman spectra were used to study the first- and second-order signals of multi-wall carbon nanotubes. Bamboo-shaped carbon nanotubes free of filled Pd were observed under a pure methane atmosphere. (C) 2002 Elsevier Science B.V. All rights reserved.
引用
收藏
页码:27 / 32
页数:6
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