TiO2 thin films by a novel sol-gel processing for gas sensor applications

被引：348

作者：

Garzella, C ^{[1
]}

Comini, E

Tempesti, E

Frigeri, C

Sberveglieri, G

机构：

[1] Univ Brescia, Dept Chem & Phys Engn & Mat, I-25100 Brescia, Italy

[2] Univ Brescia, INFM, I-25100 Brescia, Italy

[3] CNR, Inst Maspec, I-43100 Parma, Italy

来源：

SENSORS AND ACTUATORS B-CHEMICAL | 2000年 / 68卷 / 1-3期

关键词：

TiO2; sol-gel deposition; thin film; alcohol sensing;

D O I：

10.1016/S0925-4005(00)00428-7

中图分类号：

O65 [分析化学];

学科分类号：

070302 ; 081704 ;

摘要：

Novel thin films of titanium dioxide dispersed in a polymeric matrix have been prepared by a chemically modified sol-gel technique. Nanostructured films of pure TiO2 in the anatase form are obtained after annealing at 500 degrees C. SEM, TEM and TG/DTA are used for the structure characterisation of TiO2 films. The role of the polymer in controlling the microstructure is confirmed. The first application of this technique in gas sensor field is presented in this work. Ethanol and methanol sensing properties are tested and reported. TiO2 sensors can detect very well concentration required for breath analysers. (C) 2000 Elsevier Science S.A. All rights reserved.

引用

页码：189 / 196

页数：8

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