Improving the characteristics in magnetostrictive-piezoelectric sensors when the viscous interface is removed

被引:12
作者
Prieto, JL [1 ]
Sánchez, P
Aroca, C
López, E
Sánchez, MC
de Abril, O
Pérez, L
机构
[1] Univ Politecn Madrid, Grp Disposit Magnet, Dept Fis Aplicada Technol, ETS Ing Telecomunicac, E-28040 Madrid, Spain
[2] Univ Complutense Madrid, Fac Ciencias Fis, Dept Fis Mat, E-28040 Madrid, Spain
关键词
magnetic sensor; piezoelectric; magnetostriction;
D O I
10.1016/S0924-4247(00)00405-2
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
This paper presents the results obtained with a prototype of a magnetostrictive-piezoelectric magnetic sensor where the ferromagnetic material has been grown by sputtering over the piezoelectric support where a copper layer has been previously deposited and electrolitically polished. In this way, the coupling between the piezoelectric and the ferromagnetic materials is stronger than that obtained by using a viscous fluid between both materials, as it is used to be. The most significant advances are the good sensitivity of 0.5 mV/mu T for a 1.5-mu m-thick ferromagnetic layer and the important reduction of the magnetic hysteresis due to the piezoelectric vibration. (C) 2000 Elsevier Science S.A. All rights reserved.
引用
收藏
页码:338 / 341
页数:4
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