Rf-plasma nitriding of stainless steel

被引：68

作者：

Baldwin, MJ

Fewell, MP ^{[1
]}

Haydon, SC

Kumar, S

Collins, GA

Short, KT

Tendys, J

机构：

[1] Univ New England, Div Phys & Elect Engn, Armidale, NSW 2351, Australia

[2] Australian Nucl Sci & Technol Org, Menai, NSW 2234, Australia

来源：

SURFACE & COATINGS TECHNOLOGY | 1998年 / 98卷 / 1-3期

基金：

澳大利亚研究理事会;

关键词：

plasma nitriding; low-pressure rf plasma; austenitic stainless steel; plasma diagnostics; cross-sectional SEM; instrumented microhardness; RES; XRD;

D O I：

10.1016/S0257-8972(97)00150-3

中图分类号：

TB3 [工程材料学];

学科分类号：

0805 ; 080502 ;

摘要：

This paper presents results from a study of the nitriding of AISI-316 stainless steel by a low-pressure pure-nitrogen rf plasma at a temperature of 400 degrees C. The nitrided layers were examined with scanning electron microscopy, X-ray diffraction, Rutherford backscattering and microhardness measurements. The results, when correlated with results from Langmuir-probe and spectroscopy measurements on the plasma, suggest that the density of excited neutral molecules is a more important influence on the nitriding kinetics than the density of ions in this particular process. (C) 1998 Elsevier Science S.A.

引用

页码：1187 / 1191

页数：5

共 17 条

[1] NITRIDING OF AUSTENITIC STAINLESS-STEEL BY PLASMA IMMERSION ION-IMPLANTATION [J].