Geometrical error compensation of precision motion systems using radial basis function

被引：27

作者：

Tan, KK ^{[1
]}

Huang, SN ^{[1
]}

Seet, HL ^{[1
]}

机构：

[1] Natl Univ Singapore, Dept Elect Engn, Singapore 117576, Singapore

来源：

IEEE TRANSACTIONS ON INSTRUMENTATION AND MEASUREMENT | 2000年 / 49卷 / 05期

关键词：

geometrical error compensation; precision motion control; radial basis functions;

D O I：

10.1109/19.872918

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

This paper describes a new method for geometrical error compensation of precision motion systems. The compensation is carried out with respect to an overall geometrical error model which is constructed from the individual error components associated with each axis of the machine. These error components are modeled using radial basis functions (RBFs), thus dispensing with the conventional look-up table. The adequacy and clear benefits of the proposed approach are illustrated from an application to an XY table.

引用

页码：984 / 991

页数：8

共 16 条

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