CMOS monolithic atomic force microscope

被引：4

作者：

Barrettino, D ^{[1
]}

Hafizovic, S ^{[1
]}

Volden, T ^{[1
]}

Sedivy, J ^{[1
]}

Kirstein, K ^{[1
]}

Hierlermann, A ^{[1
]}

Baltes, H ^{[1
]}

机构：

[1] ETH Honggerberg, Swiss Fed Inst Technol, Phys Elect Lab, CH-8093 Zurich, Switzerland

来源：

2004 SYMPOSIUM ON VLSI CIRCUITS, DIGEST OF TECHNICAL PAPERS | 2004年

关键词：

CMOS; MEMS; atomic force microscopy; cantilever array; parallel scanning; and PID control;

D O I：

10.1109/VLSIC.2004.1346597

中图分类号：

TP3 [计算技术、计算机技术];

学科分类号：

0812 ;

摘要：

A single-chip atomic force microscope fabricated in industrial CMOS-technology with post-CMOs micromachining is presented, which comprises an array of twelve cantilevers with integrated deflection sensors and actuators, digital proportional-integral-derivative (PID) deflection controllers, amplification stages, offset compensation circuitry, digital filters for sensor-actuator coupling compensation, A/D and D/A converters, dedicated serial lines (one per cantilever) for fast data transfer, and an (IC)-C-2 serial interface for chip programming. Parallel scanning imaging evidenced a height resolution better than 10nm.

引用

页码：306 / 309

页数：4

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