A brief review of quantitative aspects of electron energy loss spectroscopy and imaging

This review addresses a number of aspects of electron energy loss spectroscopy (EELS) for quantitative analysis, including: procedures for the quantification of EELS elemental analysis and mapping with an indication of the accuracies and detection sensitivities; procedures for the extraction of valence band electronic structures using low loss spectroscopy; and an outline of methods available for the quantitative determination of local valencies, coordinations, and bond lengths of atomic species using electron loss near edge and extended fine structures (ELNES and EXELFS). Additionally, a number of applications of quantitative EELS in spatially resolved studies of interfaces and defects are highlighted.