Ion irradiation effects on ionic liquids interfaced with rf discharge plasmas

被引：54

作者：

Baba, K. ^{[1
]}

Kaneko, T. ^{[1
]}

Hatakeyama, R. ^{[1
]}

机构：

[1] Tohoku Univ, Dept Elect Engn, Sendai, Miyagi 9808579, Japan

来源：

APPLIED PHYSICS LETTERS | 2007年 / 90卷 / 20期

关键词：

D O I：

10.1063/1.2739327

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

The availability of plasma ion irradiation toward a gas-liquid interface is investigated in a rf discharge system incorporating an ionic liquid. The introduction of the ionic liquid to the plasma causes the formation of a sheath electric field on the ionic liquid surface, resulting in the acceleration of the ions to the ionic liquid and the generation of secondary electrons from the ionic liquid by the ion irradiation. These effects are found to advance the discharge process and enhance the plasma production. (C) 2007 American Institute of Physics.

引用

页数：3

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