A new silicon rate gyroscope

被引：29

作者：

Geiger, W ^{[1
]}

Folkmer, B ^{[1
]}

Merz, J ^{[1
]}

Sandmaier, H ^{[1
]}

Lang, W ^{[1
]}

机构：

[1] Hahn Schikard Gesell, Inst Micromachining & Informat Technol, HSG, IMIT, D-78052 Villingen Schwenningen, Germany

来源：

MICRO ELECTRO MECHANICAL SYSTEMS - IEEE ELEVENTH ANNUAL INTERNATIONAL WORKSHOP PROCEEDINGS | 1998年

关键词：

D O I：

10.1109/MEMSYS.1998.659828

中图分类号：

TP [自动化技术、计算机技术];

学科分类号：

0812 ;

摘要：

HSG-IMIT is developing a new silicon rate gyroscope of very small size, low cost, and high performance. The device is called MARS-RR, which means Micromachined Angular Rate Sensor with two Rotary oscillation modes. First prototypes, MARS-RR1 yielded random walk and bias stability as low as 0.27 deg/root h and 65 deg/h, respectively. The noise equivalent rate (3 sigma) corresponds to a resolution of 0.096 deg/s in a 50 Hz bandwidth. This performance is achieved by a new sensor design featuring decoupling of the actuation and the detection oscillation modes. Because of decoupling the modes mechanical and electromechanical crosstalk, one main error source of micromachined gyros, can be reduced and therefore the zero rate output (ZRO) almost disappears. Despite the small sensor area of 6 mm(2) the detection capacitance amounts to about 3 pF. Thus subatomic deflections are detectable and a high sensitivity is achieved. MARS-RR1 was manufactured within the Bosch Foundry process [1-3] and therefore it was possible for us to reduce the development time considerably.

引用

页码：615 / 620

页数：4