Hierarchical pattern replication by polymer demixing

被引：33

作者：

Sprenger, M

Walheim, S

Schäfle, C

Steiner, U

机构：

[1] Univ Groningen, Dept Polymer Chem, NL-9747 AG Groningen, Netherlands

[2] Univ Groningen, Ctr Mat Sci, NL-9747 AG Groningen, Netherlands

[3] Univ Konstanz, Fachbereich Phys, D-78457 Constance, Germany

来源：

ADVANCED MATERIALS | 2003年 / 15卷 / 09期

关键词：

D O I：

10.1002/adma.200304463

中图分类号：

O6 [化学];

学科分类号：

0703 ;

摘要：

The hierarchical pattern replication by polymer demixing was studied. Photolithography was firmly established for the replication of patterns on micrometer and sub-micrometer length scales, but there was an increasing interest in alternative technologies. A new technique that allows one to create structures with a lateral size of ≈ 100 nm, which were registered with respect to substrate pattern was demonstrated.

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页码：703 / 706

页数：4

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