Micro-Raman scattering and photoluminescence study of boron-doped diamond films

被引:9
作者
Wang, YG [1 ]
Li, HD
Xiong, YY
Zhang, SL
Lin, ZD
Feng, K
机构
[1] Chinese Acad Sci, State Key Lab Surface Phys, Beijing 100080, Peoples R China
[2] Peking Univ, Dept Phys, Beijing 100871, Peoples R China
关键词
micro-Raman; photoluminescence; boron;
D O I
10.1016/S0925-9635(00)00302-2
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
Micro-Raman scattering and photoluminescence spectra are implemented to investigate the characteristics of heavily boron-doped polycrystalline and homoepitaxial diamond films. Large differences on peak position and peak shape are observed between different growth sectors, the shift of the one-phonon diamond Raman peak is the largest in homoepitaxial (111) growth sector. These differences are due to different boron doping ratios in different growth sectors, the (111) growth sector contains more boron than the (100) growth sector. Fano-type interference appears in all spectra, the interference intensity increases with the increase of boron incorporation density. Upon boron doping, some luminescence emission bands due to nitrogen and silicon are quenched, the reason for this phenomena is the dramatic reduction of vacancies upon the incorporation of boron accepters. (C) 2000 Elsevier Science S.A. All rights reserved.
引用
收藏
页码:1708 / 1711
页数:4
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