New designs of micromachined vibrating rate gyroscopes with decoupled oscillation modes

被引：20

作者：

Geiger, W ^{[1
]}

Folkmer, B ^{[1
]}

Sobe, U ^{[1
]}

Sandmaier, H ^{[1
]}

Lang, W ^{[1
]}

机构：

[1] HSG, IMIT, D-78052 Villingen Schwenningen, Germany

来源：

SENSORS AND ACTUATORS A-PHYSICAL | 1998年 / 66卷 / 1-3期

关键词：

rate gyroscopes; system simulation; levitation;

D O I：

10.1016/S0924-4247(97)01758-5

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

This paper reports on new vibrating comb-drive rate gyroscope designs featuring decoupling of the actuation and the detection mode. Analytical calculations as well as FEM and system simulations are carried out. It is investigated how to overcome the main drawbacks of these sensors, which are especially the frequency mismatch of the two oscillation modes, the insufficient bandwidth and the effects of levitation. Concepts and simulations of electrostatically controlling both the resonance frequency and the bandwidth are presented. Within these concepts no mechanical balancing of the device is required and thus calibration costs are reduced. Simulations of a new quasi-rotating rate gyroscope show that a resolution of 0.1 degrees s(-1) is possible at a bandwidth of 50 Hz with 6 mm(2) sensor area only, and that the effects of levitation are actually compensated. The design has been fabricated within the Bosch Foundry process. First measurements of the angular rate show a resolution of 0.5 degrees s(-1) in a 50 Hz bandwidth. (C) 1998 Elsevier Science S.A. All rights reserved.

引用

页码：118 / 124

页数：7

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