Damascene Process for Controlled Positioning of Magnetic Colloidal Nanocrystals

被引:8
作者
Chen, Gang [1 ]
Bodnarchuk, Maryna I. [1 ]
Kovalenko, Maksym V. [1 ]
Springholz, Gunther [1 ]
Heiss, Wolfgang [1 ]
Jantsch, Wolfgang [1 ]
Platzgummer, Elmar [2 ]
Loeschner, Hans [2 ]
Schotter, Joerg [3 ]
机构
[1] Johannes Kepler Univ Linz, Inst Semicond & Solid State Phys, A-4040 Linz, Austria
[2] IMS Nanofabricat AG, A-1020 Vienna, Austria
[3] AIT Austrian Inst Technol GmbH, Nano Syst Hlth & Environm Dept, A-1220 Vienna, Austria
关键词
SILICA NANOPARTICLES; FEPT NANOPARTICLES; PHOTONIC CRYSTALS; THIN-FILMS; ARRAYS; SHAPE; CRYSTALLIZATION; RESONANCE; SURFACES; GROWTH;
D O I
10.1002/adma.200902884
中图分类号
O6 [化学];
学科分类号
0703 ;
摘要
Nanocrystals, deposited on Si wafers, are maneuvered into sub-100-nm-sized pits or grooves by a Damascene process, that is, dropcasting and subsequent mechanical polishing. Single occupation is demonstrated for magnetic nanocrystals with diameter down to 18 nm. The figure show scanning electron microscopy and magnetic force microscopy images for a set of pits occupied by single Fe(3)O(4) magnetic nanocrystals with 50-nm size.
引用
收藏
页码:1364 / +
页数:6
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