Soft-X-Ray-Charged Vertical Electrets and Its Application to Electrostatic Transducers

被引：13

作者：

Honzumi, Makoto ^{[1
]}

Ueno, Ai ^{[1
]}

Hagiwara, Kei ^{[2
]}

Suzuki, Yuji ^{[1
]}

Tajima, Toshifumi ^{[2
]}

Kasagi, Nobuhide ^{[1
]}

机构：

[1] Univ Tokyo, Tokyo, Japan

[2] NHK Japan Broadcasting Corp, Sci & Tech Res Labs, Tokyo, Japan

来源：

MEMS 2010: 23RD IEEE INTERNATIONAL CONFERENCE ON MICRO ELECTRO MECHANICAL SYSTEMS, TECHNICAL DIGEST | 2010年

关键词：

D O I：

10.1109/MEMSYS.2010.5442328

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

A novel charging method for vertical electrets in narrow gaps using soft X-rays has been developed. Electrets can be charged up to the depth 20 similar to 30 times of the gap opening. With the present charging technology, MEMS electret transducers can be fabricated using a single wafer without assembling process. We demonstrate performance of vertical electrets using early prototype of in-plane accelerometer. Under 18.7 mu m(p-p) external oscillation at 500 Hz, 30 mV output has been obtained without external bias voltage. Surface potential for 80 mu m-deep vertical electrets is estimated to be 52 V.

引用

页码：635 / 638

页数：4

共 17 条

[1]

Boland J, 2003, PROC IEEE MICR ELECT, P538

[2] LOW-RESONANT-FREQUENCY MICRO ELECTRET GENERATOR FOR ENERGY HARVESTING APPLICATION [J].

Edamoto, M. ;

Suzuki, Y. ;

Kasagi, N. ;

Kashiwagi, K. ;

Morizawa, Y. ;

Yokoyama, T. ;

Seki, T. ;

Oba, M. .

IEEE 22ND INTERNATIONAL CONFERENCE ON MICRO ELECTRO MECHANICAL SYSTEMS (MEMS 2009), 2009, :1059-1062

[3] On the permanent electret [J].

Eguchi, M .

PHILOSOPHICAL MAGAZINE, 1925, 49 (289) :178-192

[4]

GOTO M, 2009, IEICE TECH REP, V109, P69

[5]

HAGIWARA K, 2009, POWERMEMS 2 IN PRESS

[6]

Hsieh W. H., 1999, INT C SOL STAT SENS, P1064

[7] Parylene-based electret power generators [J].

Lo, Hsi-wen ;

Tai, Yu-Chong .

JOURNAL OF MICROMECHANICS AND MICROENGINEERING, 2008, 18 (10)

[8]

Miki Daigo, 2009, 15th International Conference on Solid-State Sensors, Actuators and Microsystems. Transducers 2009, P636, DOI 10.1109/SENSOR.2009.5285405

[9]

MIKI D, 2010, 23 IEEE INT C MEMS M

[10] Electrostatic micro power generation from low-frequency vibration such as human motion [J].

Naruse, Y. ;

Matsubara, N. ;

Mabuchi, K. ;

Izumi, M. ;

Suzuki, S. .

JOURNAL OF MICROMECHANICS AND MICROENGINEERING, 2009, 19 (09)

← 1 2 →