Pulsed laser deposition of solid-solution films using segmented targets

被引：29

作者：

Christen, HM ^{[1
]}

Norton, DP ^{[1
]}

Gea, LA ^{[1
]}

Boatner, LA ^{[1
]}

机构：

[1] Oak Ridge Natl Lab, Div Solid State, Oak Ridge, TN 37831 USA

来源：

THIN SOLID FILMS | 1998年 / 312卷 / 1-2期

关键词：

pulsed laser; solid-solution films; laser beam;

D O I：

10.1016/S0040-6090(97)00736-0

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

A new method for the growth of solid-solution thin films has been developed in which a pre-determined ratio of the components can be deposited by the controlled use of a single rotating target. This variable compositional control is achieved by altering the radial position of either the target, which incorporates wedge-shaped segments of the solid-solution components, or of the laser beam. The method was used to grow films of the solid solution KTa1-xNbxO3 for which the predicted and measured values of the ferroelectric transition temperature far selected Ta/Nb ratios were in excellent agreement. This approach is generally applicable to solid-solution systems and is not restricted to ferroelectric oxides. (C) 1998 Elsevier Science S.A.

引用

页码：156 / 159

页数：4

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