Direct plating of electroless Ni-P layers on sputter-deposited Al-Ni alloy films

被引:15
作者
Azumi, K [1 ]
Yugiri, T
Kurihara, T
Seo, M
Habazaki, H
Fujimoto, S
机构
[1] Hokkaido Univ, Grad Sch Engn, Sapporo, Hokkaido 0608628, Japan
[2] Osaka Univ, Grad Sch Engn, Suita, Osaka, Japan
关键词
D O I
10.1149/1.1576770
中图分类号
O646 [电化学、电解、磁化学];
学科分类号
081704 ;
摘要
Direct plating of electroless Ni-P layers on Al-Ni alloy films formed on glass substrates was performed using magnetron-sputtered deposition and ion beam-assisted deposition methods. Dissolution of Al from the alloy films occurred in the initial stage of the plating process and resulted in enrichment of Ni on the surface. Since Ni acts as a catalyst for the Ni-P deposition reaction, Ni-P deposition occurs on the alloy surface without zincate pretreatment. In the case of an Al-10Ni alloy film, however, Ni clusters dropped from the Al-Ni alloy surface, and Ni-P particles grew in the plating bath, causing dissipation of chemicals in the bath. Such particles also readhered to the surface, resulting in a nonuniform plating layer. A lower concentration of Ni in an alloy such as an Al-3Ni or Al-1Ni alloy resulted in a rather smooth plating surface. In the case of a neutral plating bath containing a low concentration of P, cone structures were formed in the plating layer. Such structures seem to form at the nucleation sites of Ni deposition in the initial stage of the plating process. (C) 2003 The Electrochemical Society.
引用
收藏
页码:C461 / C464
页数:4
相关论文
共 10 条
[1]   Double zincate pretreatment of sputter-deposited Al films [J].
Azumi, K ;
Yugiri, T ;
Seo, M ;
Fujimoto, S .
JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 2001, 148 (06) :C433-C438
[2]  
AZUMI K, UNPUB
[3]   PLATING ON ANODIZED ALUMINUM .1. THE MECHANISM OF CHARGE-TRANSFER ACROSS THE BARRIER-LAYER OXIDE FILM ON 1100 ALUMINUM [J].
GRUBERGER, J ;
GILEADI, E .
ELECTROCHIMICA ACTA, 1986, 31 (12) :1531-1540
[4]   DIRECT NICKEL-PLATING ON ALUMINUM SUBSTRATE FOR MICROBUMP FORMATION [J].
HONMA, H ;
WATANABE, H ;
KOBAYASHI, T .
JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1994, 141 (07) :1791-1795
[5]  
KATSUKAWA T, 1994, HYOMEN GIJUTSU, V45, P543
[6]  
MALLORY GO, 1985, PLAT SURF FINISH, V72, P6
[7]  
Tashiro K., 1999, HYOMEN GIJUT, V50, P140
[8]  
TASHIRO K, 1994, HYOMEN GIJUTSU, V47, P349
[9]   Fabrication of nickel microbump on aluminum using electroless nickel plating [J].
Watanabe, H ;
Honma, H .
JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1997, 144 (02) :471-476
[10]   PLATING ON ANODIZED ALUMINUM .2. THE EFFECT OF THE METAL, THE ANION AND THE ALUMINUM-ALLOY [J].
ZAGIEL, A ;
NATISHAN, P ;
GILEADI, E .
ELECTROCHIMICA ACTA, 1990, 35 (06) :1019-1030