Fluorine Plasma Treatments of Poly(propylene) Films, 2-Modeling Reaction Mechanisms and Scaling

被引:26
作者
Yang, Yang [2 ]
Strobel, Mark [3 ]
Kirk, Seth [3 ]
Kushner, Mark J. [1 ]
机构
[1] Univ Michigan, Dept Elect Engn & Comp Sci, Ann Arbor, MI 48109 USA
[2] Iowa State Univ, Dept Elect & Comp Engn, Ames, IA 50011 USA
[3] 3M Co, Ctr 3M, Corp Res Proc Lab, St Paul, MN 55144 USA
关键词
capacitively coupled; films; fluorination; modeling; polymer modification; surface composition; TOTAL CROSS SECTIONS; GAS-PHASE REACTIONS; RATE-CONSTANT; POLYTETRAFLUOROETHYLENE PTFE; ATMOSPHERIC-PRESSURE; POLYMER SURFACES; ROOM-TEMPERATURE; POLYPROPYLENE; ATOMS; POLYETHYLENE;
D O I
10.1002/ppap.200900114
中图分类号
O59 [应用物理学];
学科分类号
摘要
The surface properties of commodity hydrocarbon polymers such as poly(propylene) (PP) can be modified by functionalization with plasma-generated radicals and ions. For example, affixing fluorine to a hydrocarbon surface lowers surface energy and increases hydrophobicity. One such process is treatment of PP films in low-pressure, capacitively coupled plasmas (CCPs) sustained in F-2-containing gas mixtures. F atoms produced in the plasma abstract H atoms from the hydrocarbon and passivate the resulting alkyl sites producing C-F-n sites. Energetic ion and photon fluxes sputter and initiate crosslinking. In this paper, the plasma fluorination of PP in a CCP sustained in Ar/F-2 is discussed with results from a two-dimensional plasma hydrodynamics model. The surface reaction mechanism includes a hierarchy of H abstraction and F/F-2 passivation reactions, as well as crosslinking, and ion and photon-activated processes. Predictions for surface composition were compared to experiments. We found that the lack total fluorination with long plasma exposure is likely caused by crosslinking, which creates C-C bonds that might otherwise be passivated by F atoms. Increasing steric hindrances as fluorination proceeds also contribute to lower F/C ratios.
引用
收藏
页码:123 / 150
页数:28
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